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Understanding ICV Back End Of Line Runsets for Dummy Metal Fill

Posted: Sun Mar 26, 2017 8:50 pm
by pruthwish

I see various metal types METAL_U_M1,METAL_R_M1,METAL_Z_M1, METAL_YZ_M1, METAL_YY_M1, METAL_XY_M1, METAL_XC_M1, METAL_XE_M1, METAL_XA_M1in dummy beol metal fill runsets, can any one please tell me why we have so many metal types for a single layer?